E-beam inspection apparatus and method of using the same on various integrated circuit chips

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United States of America Patent

PATENT NO 9793090
SERIAL NO

14989729

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Abstract

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The present invention discloses an e-beam inspection tool, and an apparatus for detecting defects. In one aspect is described an apparatus for detecting defects that includes a focusing column that accelerates the e-beam and separately, for each of the plurality of predetermined locations, focuses the e-beam to a predetermined non-circular spot that is within the predetermined surface area of each of the plurality of predetermined locations based upon the major axis.

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Patent Owner(s)

  • PDF SOLUTIONS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ciplickas, Dennis J San Jose, US 14 610
De, Indranil San Jose, US 118 985
Hess, Christopher Belmont, US 123 1305

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