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Abstract

A spectral microscopy device includes a spectral detecting unit including a light source capable of controlling an output wavelength, a microscope section having an observation area illuminated with light output from the light source, and a signal detector that detects light from the observation area as spectral data; a moving unit configured to move the observation area; and a controller that performs a control operation to allow the spectral detecting unit and the moving unit to move in response to each other. The spectral microscopy device is controlled so that switching between different measurement conditions based on the number of measurement points is performed at an observation area movement time in which the observation area is moved by the moving unit and measurement is performed and at a an observation area movement stoppage time in which the observation area is fixed and measurement is performed, and spectral data is detected.

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First Claim