ELECTROMAGNETIC MEMS DEVICE
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United States of America Patent
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app pub date -
Dec 16, 2015
filing date -
Oct 31, 2014
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Abandoned
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Abstract
Embodiments of the present disclosure are directed toward an apparatus comprising a frameless MEMS device with a two-dimensional (2D) mirror, in accordance with some embodiments. The apparatus may include a base and a MEMS device disposed on the base. The MEMS device may comprise a rotor having a driving coil disposed around the rotor that is partially rotatable around a first axis, in response to interaction of a first magnetic field provided parallel to the first axis, with electric current to pass through the driving coil. The MEMS device may include a mirror disposed about a middle of the rotor. The mirror may be partially rotatable around a second axis coupled with the rotor and orthogonal to the first axis, in response to interaction of a second magnetic field provided parallel to the second axis, with electric current to pass through the coil. Other embodiments may be described and/or claimed.
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