Metal nitride material for thermistor, method for producing same, and film type thermistor sensor

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United States of America Patent

PATENT NO 9754706
APP PUB NO 20160125982A1
SERIAL NO

14895794

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Abstract

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Provided are a metal nitride material for a thermistor, which has a high heat resistance and a high reliability and can be directly deposited on a film or the like without firing, a method for producing the same, and a film type thermistor sensor. The metal nitride material for a thermistor consists of a metal nitride represented by the general formula: (M1−vVv)xAly(N1−wOw)z (where 0.0

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Patent Owner(s)

  • MITSUBISHI MATERIALS CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujita, Toshiaki Naka, JP 42 300
Nagatomo, Noriaki Naka, JP 31 102
Tanaka, Hiroshi Naka, JP 1050 11756

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