Wafer aligner
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Aug 25, 2020
Grant Date -
May 5, 2016
app pub date -
Oct 30, 2015
filing date -
Nov 4, 2014
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A semiconductor wafer transport apparatus includes a frame, a transport arm movably mounted to the frame and having at least one end effector movably mounted to the arm so the at least one end effector traverses, with the arm as a unit, in a first direction relative to the frame, and traverses linearly, relative to the transport arm, in a second direction, and an edge detection sensor mounted to the transport arm so the edge detection sensor moves with the transport arm as a unit relative to the frame, the edge detection sensor being a common sensor effecting edge detection of each wafer simultaneously supported by the end effector, wherein the edge detection sensor is configured so the edge detection of each wafer is effected by and coincident with the traverse in the second direction of each end effector on the transport arm.
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