SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME

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United States of America Patent

APP PUB NO 20160126251A1
SERIAL NO

14601384

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Abstract

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According to one embodiment, a semiconductor memory device includes a substrate that includes a first region and a second region; a stacked body that is disposed on the first region of the substrate and includes a plurality of first metal layers and a plurality of voids each of which is disposed between the plurality of first metal layers; a columnar portion that penetrates the stacked body, extends in a direction of stacking in the stacking body; a transistor that is disposed on the second region; and the interconnect portion that is disposed on the transistor and includes the plurality of first metal layers and a plurality of second metal layers each of which is disposed between the plurality of first metal layers. The transistor is electrically connected to the channel body or the first metal layer of the stacked body through a interconnect portion.

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Patent Owner(s)

Patent OwnerAddress
KABUSHIKI KAISHA TOSHIBAMINATO-KU TOKYO 105-8001

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
FUJITA, Masanari Yokkaichi, JP 49 389
FUKUZUMI, Yoshiaki Yokkaichi, JP 334 10841

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