Imprint method, imprint apparatus, mold, and article manufacturing method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10620532
APP PUB NO 20160129612A1
SERIAL NO

14921112

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Abstract

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Provided is an imprint method that molds an uncured resin applied to a substrate by a pattern portion formed on a mold and cures the uncured resin so as to form the pattern of the resin cured on the substrate. The imprint method includes a step of releasing the pattern portion from the resin such that two opposed boundaries are brought closer to each other to progress peeling while maintaining a parallel state after curing of the resin based on the assumption that the boundary at which the pattern portion is peeled from the resin is linear.

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First Claim

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Okinaka, Motoki Inagi, JP 22 94
Seki, Junichi Kawasaki, JP 90 1200

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