Measurement object, method for the production thereof and device for the thermal treatment of substrates
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United States of America Patent
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Jul 17, 2018
Grant Date -
May 12, 2016
app pub date -
Jun 13, 2014
filing date -
Jun 13, 2013
priority date (Note) -
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Abstract
A measuring object for use in a heating apparatus for the thermal treatment of substrates is described, wherein the measuring object is the substrate to be treated or an object which in use has a substantially known temperature relation to the substrate to be treated, wherein the measuring object comprises a surface having at least one surface area, which acts as a measuring surface for an optical temperature measurement. A predetermined structure in the form of a plurality of recessions is formed in the surface area, in order to influence the emissivity of the surface area.
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