Method and apparatus for calibrating pressure sensor integrated circuit devices

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United States of America Patent

PATENT NO 10444103
APP PUB NO 20160131550A1
SERIAL NO

14538397

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Abstract

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In an embodiment, a method for calibrating a pressure sensor device is disclosed. The method involves determining the resonant frequency of a membrane of the pressure sensor device after the pressure sensor device has been attached to a circuit board, calculating a change in the resonant frequency from a resonant frequency stored in memory, calculating strain of the membrane of the pressure sensor device from the change in resonant frequency, and calibrating the pressure sensor device based on a capacitance-to-pressure curve calculated using the strain of the membrane of the pressure sensor device.

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Patent Owner(s)

  • AMS INTERNATIONAL AG

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Besling, Willem Frederik Adrianus Eindhoven, NL 46 590
Goossens, Martijn Veldhoven, NL 15 225
Pijnenburg, Remco Henricus Wilhelmus Hoogeloon, NL 36 269
van, der Avoort Casper Waalre, NL 28 128

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