Forming strained fins of different material on a substrate

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United States of America Patent

PATENT NO 9362182
APP PUB NO 20160133528A1
SERIAL NO

14534678

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Abstract

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A method, and the resulting structure, of forming two fins with different types of strain and material on the same substrate.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINES CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cheng, Kangguo Schenectady, US 3073 29638
Doris, Bruce B Slingerlands, US 796 13224
Hashemi, Pouya White Plains, US 600 4453
Khakifirooz, Ali Los Altos, US 842 11881
Reznicek, Alexander Troy, US 1407 11147

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