SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
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United States of America Patent
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Issued Date -
May 12, 2016
app pub date -
Nov 11, 2014
filing date -
Nov 11, 2014
priority date (Note) -
Abandoned
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Abstract
A semiconductor structure includes a substrate comprising a plurality of layers formed thereon, at least a first device formed in one of the layers formed thereon, a drawn region enclosing the first device, and a plurality of dummy structures in another layer. The dummy structures are formed in a first region correspondingly outside of the drawing region and in a second region correspondingly inside of the drawing region.
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