Method for determining wave-front aberration data of a to-be-tested optical system
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United States of America Patent
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Aug 14, 2018
Grant Date -
May 19, 2016
app pub date -
Jun 9, 2014
filing date -
Jun 10, 2013
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Abstract
A method for determining wave-front aberration data of a to-be-tested optical system comprising the steps of: a) providing a wave-front sensing image of light received from the tested optical system; b) providing a model representative of the optical system with at least an optical parameter representative of said model; and c) optimizing a set of wave-front coefficient data and said at least optical parameter of said model according to a merit function calculating the merit function comprises the steps of generating a wave-front sensing modeled image of light received from said model by the at least optical parameter and the set of wave-front coefficient data, and calculating a criteria based on shape parameter data of the wave-front sensing image and shape parameter data of the wave-front sensing modeled image, so as to obtain wave-front aberration data of the tested optical system.
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