MEMS device having a getter

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United States of America Patent

PATENT NO 9511998
APP PUB NO 20160137493A1
SERIAL NO

14207752

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Abstract

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A microelectromechanical system (MEMS) device includes a high density getter. The high density getter includes a silicon surface area formed by porosification or by the formation of trenches within a sealed cavity of the device. The silicon surface area includes a deposition of titanium or other gettering material to reduce the amount of gas present in the sealed chamber such that a low pressure chamber is formed. The high density getter is used in bolometers and gyroscopes but is not limited to those devices.

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Patent Owner(s)

  • ROBERT BOSCH GMBH

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Feyh, Ando Palo Alto, US 94 455
Graham, Andrew Redwood City, US 67 562
Kim, Bongsang Mountain View, US 30 207
O'Brien, Gary Palo Alto, US 82 663
Purkl, Fabian Palo Alto, US 32 88
Samarao, Ashwin Mountain View, US 24 170
Yama, Gary Mountain View, US 67 455

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