Optical apparatus, processing apparatus, and article manufacturing method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10663716
APP PUB NO 20160139403A1
SERIAL NO

14935547

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Abstract

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An optical apparatus is provided. The apparatus comprises a rotatable reflecting member including a first reflecting surface and a second reflecting surface, an optical system configured to sequentially reflect, by a plurality of reflecting surfaces included therein, light reflected by the first reflecting surface and cause the light to be incident on the second reflecting surface, and an adjusting device configured to change a rotation angle of the reflecting member to adjust an optical path of light that is reflected by the second reflecting surface and exits the second reflecting surface.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kume, Masaharu Utsunomiya, JP 14 199

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