LASER OSCILLATION MECHANISM

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United States of America Patent

SERIAL NO

14933240

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A laser oscillation mechanism includes a pulse laser oscillator which oscillates a pulse laser beam, and an optical path changing unit which changes an angle of an optical path of the pulse laser beam oscillated by the pulse laser oscillator. The optical path changing unit is configured from an acousto-optic deflection unit including an acousto-optic device for changing the optical path of the pulse laser beam oscillated by the pulse laser oscillator within an effective region, and a volume Bragg grating which excludes, from among pulse laser beams obtained by changing the angle of the optical path of the pulse laser beam by passing through the acousto-optic device, a pulse laser beam desired to be eliminated by refraction from within the effective region.

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Patent Owner(s)

Patent OwnerAddress
DISCO CORPORATION13-11 OMORI-KITA 2-CHOME OTA-KU TOKYO 143-8580

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nomaru, Keiji Tokyo, JP 118 585

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