Imprint apparatus, method of calibrating correction mechanism, and method of manufacturing article
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United States of America Patent
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Apr 28, 2020
Grant Date -
May 26, 2016
app pub date -
Nov 17, 2015
filing date -
Nov 20, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
An imprint apparatus includes a mold holding unit configured to hold a mold, a correction mechanism configured to correct a shape of a pattern formed in the mold to a desired shape by applying a force to the mold held in the mold holding unit, and a controller configured to assume a plurality of mold pattern shapes for a specific mold, calculate a parameter for associating the plurality of assumed mold pattern shapes and a deformation amount of the specific mold by causing the correction mechanism to apply the force to the specific mold to obtain the deformation amount of the specific mold so that the plurality of assumed mold pattern shapes are formed, and calibrate the correction mechanism using the parameter.
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