MINIATURE SENSOR STRUCTURES FOR ION MOBILITY SPECTROMETERS
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United States of America Patent
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Issued Date -
May 26, 2016
app pub date -
Dec 2, 2015
filing date -
Feb 26, 2013
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Abandoned
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Abstract
For ion mobility spectrometry applications, a desired shape of a sensor structure may be created by forming a desired shape from a ceramic material, such as aluminum nitride. In various embodiments, the sensor structure may be formed using discrete individual ceramic sheets and/or from a preformed ceramic tube. Via holes are formed into the sensor structure to provide for efficient circuitry configurations of the IMS drift tube and/or providing electrical connections between the interior and exterior of the drift tube.
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