LAUNCH CONTROL OF MOVABLE LAYER IN ELECTROMECHANICAL DEVICES
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United States of America Patent
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Issued Date -
May 26, 2016
app pub date -
Nov 26, 2014
filing date -
Nov 26, 2014
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Abstract
This disclosure provides systems, methods and apparatus for forming electromechanical devices having a gap between a movable layer and a fixed layer. In one aspect, the movable layer may be supported by hinge structures, and the design of the hinge structure may be controlled to provide a desired amount of flexure, providing electromechanical devices with a desired gap height. The height of the gap may be larger than the thickness a sacrificial material used during the fabrication process. In another aspect, the design of the hinge structure may be used to control threshold voltages of electromechanical devices.
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