PRIMARY DISTILLATION BORON REDUCTION

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United States of America Patent

APP PUB NO 20160152481A1
SERIAL NO

14556640

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Abstract

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The present invention relates to an apparatus and a method for producing polycrystalline silicon having a reduced amount of boron compound impurities. Especially, the boron compounds are removed from the process for producing polycrystalline silicon, while the trichlorosilane is purified by distillation. The invention feeds condensed liquid trichlorosilane into a primary distillation tower below the liquid level inside the primary distillation tower thereby scrubbing the boron impurities upon contact inside the primary distillation tower. There result is trichlorosilane leaving the primary distillation tower with total amount of boron at least 10 times less.

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Patent Owner(s)

Patent OwnerAddress
MITSUBISHI MATERIALS CORPORATIONTOKYO
MITSUBISHI POLYCRYSTALLINE SILICON AMERICA CORPORATION (MIPSA)7800 MITSUBISHI LANE THEODORE AL 36582

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ashworth, April Mobile, US 2 1
Keevan, Michael W Theodore, US 3 4

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