Stripping and Cleaning Compositions for Removal of Thick Film Resist

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United States of America Patent

SERIAL NO

15018564

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Abstract

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Stripping and cleaning compositions suitable for the removal of film resists include about 2-55% by weight of at least one alkanolamine or at least one morpholine or mixtures thereof; about 20-94% by weight of at least one organic solvent; and about 0.5-60% by weight water based on the total weight of the composition.

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Patent Owner(s)

Patent OwnerAddress
VERSUM MATERIALS US LLC8555 SOUTH RIVER PARKWAY PATENT DEPT TEMPE AS 85284

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Egbe, Matthew I West Norriton, US 19 386
Rao, Madhukar Bhaskara Carlsbad, US 34 502
Wu, Aiping Macungie, US 32 716

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