Importance

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Abstract

There is provided a shape measuring device surface capable of measuring a three-dimensional shape at high speed and with high accuracy. Low-coherence light emitted from a low-coherence light source enters a beam splitter through a collimator and is split into a measuring light and a reference light by the beam splitter. The measuring light is expanded and parallelized by a telecentric optical system so that a measuring object is irradiated with the measuring light. The measuring light reflected from the measuring object is combined with the reference light reflected from a CCP to be allow to interfere with each other to enter a photodetector. The photodetector includes light-receiving elements that are arranged in a matrix shape. A three-dimensional shape of a portion irradiated with the measuring light is measured based on a light intensity of an interference light detected at each of the light-receiving elements of the photodetector.

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First Claim