ELECTRONIC DEVICE, PHYSICAL QUANTITY SENSOR, PRESSURE SENSOR, VIBRATOR, ALTIMETER, ELECTRONIC APPARATUS, AND MOVING OBJECT
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Jun 2, 2016
app pub date -
Nov 25, 2015
filing date -
Nov 25, 2015
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
A physical quantity sensor includes a substrate, a piezoresistive element that is arranged on one face side of the substrate, a wall portion that is arranged to surround the piezoresistive element on the one face side of the substrate in a plan view of the substrate, a ceiling portion that is arranged on the opposite side of the wall portion from the substrate and constitutes a cavity portion with the wall portion, and an inside beam portion that is arranged on the substrate side of the ceiling portion and includes a material of which the thermal expansion rate is smaller than the thermal expansion rate of the ceiling portion.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully