Capacitive micromachined ultrasonic transducer and test object information acquiring apparatus including capacitive micromachined ultrasonic transducer
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United States of America Patent
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Oct 16, 2018
Grant Date -
Jun 2, 2016
app pub date -
Nov 23, 2015
filing date -
Nov 28, 2014
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Abstract
A capacitive micromachined ultrasonic transducer includes a first insulating film and a second insulating film disposed with a gap therebetween, a first electrode and a second electrode disposed on outer surfaces of the first and second insulating films, respectively, with the gap therebetween, at least one cell having an electrostatic capacitance between the first and second electrodes that varies with a variation of a thickness of the gap caused by displacement of the second insulating film and the second electrode, and a voltage applying unit configured to apply a voltage to between the first electrode and the second electrode. An electric field strength applied to the first insulating film is closer to an electric field strength that causes dielectric breakdown than an electric field strength applied to the second insulating film.
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