Salt, acid generator, resist composition and method for producing resist pattern

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11556056
APP PUB NO 20160154304A1
SERIAL NO

14953187

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A salt represented by formula (I):

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • SUMITOMO CHEMICAL COMPANY, LIMITED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Anryu, Yukako Osaka, JP 23 87
Ichikawa, Koji Osaka, JP 298 1929
Ochiai, Mitsuyoshi Osaka, JP 14 80

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Jul 17, 2026
7.5 Year Payment $3600.00 $1800.00 $900.00 Jul 17, 2030
11.5 Year Payment $7400.00 $3700.00 $1850.00 Jul 17, 2034
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00