MIMCAP STRUCTURE IN A SEMICONDUCTOR DEVICE PACKAGE

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United States of America Patent

SERIAL NO

15014343

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Abstract

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The disclosed technology relates generally to a semiconductor device package comprising a metal-insulator-metal capacitor (MIMCAP). In one aspect, the MIMCAP comprises portions of a first and second metallization layers in a stack of metallization layers, e.g., copper metallization layers formed by single damascene processes. The MIMCAP comprises a bottom plate formed in the first metallization layer, a first conductive layer on and in electrical contact with the bottom plate, a dielectric layer on and in contact with the first conductive layer, a second conductive layer on and in contact with the dielectric layer, and a top plate formed in the second metallization layer, on and in electrical contact with the second metal plate. The electrical contacts to the bottom and top plates of the MIMCAP formed in the first and second metallization layer are thereby established without forming separate vias between the plates and the metallization layers. In addition, the first conductive layer of the MIMCAP may extend beyond the surface of the dielectric and the second layer for forming other structures.

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Patent Owner(s)

Patent OwnerAddress
IMEC3001 LEUVEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Beyne, Eric Leuven, BE 68 1947
Detalle, Mikael LimaI, BE 5 2

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