IMPRINT APPARATUS AND METHOD, AND METHOD OF MANUFACTURING ARTICLE
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United States of America Patent
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Issued Date -
Jun 9, 2016
app pub date -
Dec 3, 2015
filing date -
Dec 3, 2015
priority date (Note) -
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Abstract
An imprint apparatus for forming a pattern on a substrate by bringing a mold into contact with an imprint material on the substrate is provided. The apparatus includes a supply device configured to supply, between the imprint material and the mold, a condensable gas that is liquefied due to a rise in pressure caused by the contact, and a controller configured to control a pressure of a gas between the imprint material and the mold before the contact so that the condensable gas between the imprint material and the mold is not liquefied before the contact.
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