STAGES, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING DEVICES
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United States of America Patent
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Issued Date -
Jun 9, 2016
app pub date -
Dec 3, 2015
filing date -
Dec 3, 2015
priority date (Note) -
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status (Latency Note)
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Abstract
A stage apparatus includes a moving part and chuck. The moving part can hold a substrate and move. The chuck has a holding surface divided into regions whose holding strength can be regulated individually. Some parts of the divided regions hold a part of the substrate. The moving part and the chuck are physically isolated.
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