Method for improving quality of spalled material layers

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United States of America Patent

PATENT NO 9564335
SERIAL NO

15046134

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Abstract

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Methods for removing a material layer from a base substrate utilizing spalling in which mode III stress, i.e., the stress that is perpendicular to the fracture front created in the base substrate, during spalling is reduced. The substantial reduction of the mode III stress during spalling results in a spalling process in which the spalled material has less surface roughness at one of its' edges as compared to prior art spalling processes in which the mode III stress is present and competes with spalling.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINES CORPORATION;KING ABDULAZIZ CITY FOR SCIENCE AND TECHNOLOGY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Alhomoudi, Ibrahim Alhufof, SA 8 27
Bedell, Stephen W Wappingers Falls, US 409 5550
Fogel, Keith E Hopewell Junction, US 270 4155
Lauro, Paul A Brewster, US 85 1916
Li, Ning White Plains, US 711 4085
Sadana, Devendra K Pleasantville, US 897 9950
Saenger, Katherine L Ossining, US 127 2896

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