LASER PROCESSING METHOD AND LASER BEAM IRRADIATION APPARATUS
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United States of America Patent
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Issued Date -
Jun 16, 2016
app pub date -
Oct 1, 2013
filing date -
Oct 18, 2012
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Abstract
There is provided a laser processing method using a laser processing apparatus including a laser beam source for outputting a laser beam including a plurality of wavelength components, a collimating lens for receiving the laser beam, and a focusing lens for receiving the laser beam collimated by the collimating lens, the laser processing method including the step of: irradiating a material to be processed with the laser beam focused by the focusing lens in the laser processing apparatus. In the step of irradiating the material to be processed with the laser beam, positions of the collimating lens and the focusing lens are adjusted, and a wavefront shape of the laser beam received by the focusing lens is adjusted, thereby adjusting a size of a focusing area constituted by a plurality of focuses corresponding to the plurality of wavelength components of the laser beam focused by the focusing lens.
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