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Abstract

Disclosed is a through-hole forming method including a process of forming, by condensing and irradiating a laser beam onto an insulation substrate through a lens, a through-hole that passes through the insulation substrate in a thickness direction of the insulation substrate. A medium between the lens and the insulation substrate is air. A converging half angle θ that is calculated from a focal length f of the lens and a beam diameter d of the laser beam that enters the lens by using expression (1) satisfies expression (2):

description='In-line Formulae' end='lead'(d/2)/f=tan θ  (1), anddescription='In-line Formulae' end='tail'

description='In-line Formulae' end='lead'0.16≤sin θ≤0.22  (2).description='In-line Formulae' end='tail'

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