Salt, acid generator, resist composition and method for producing resist pattern

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United States of America Patent

PATENT NO 9771346
SERIAL NO

14968172

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Abstract

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A salt represented by formula (I):

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Patent Owner(s)

  • SUMITOMO CHEMICAL COMPANY, LIMITED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Anryu, Yukako Osaka, JP 23 87
Ichikawa, Koji Osaka, JP 299 1929
Miyagawa, Takayuki Osaka, JP 25 207

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