Hardware and process for film uniformity improvement

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10100407
APP PUB NO 20160177443A1
SERIAL NO

14578166

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Abstract

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The present inventors have conceived of a multi-stage process gas delivery system for use in a substrate processing apparatus. In certain implementations, a first process gas may first be delivered to a substrate in a substrate processing chamber. A second process gas may be delivered, at a later time, to the substrate to aid in the even dosing of the substrate. Delivery of the first process gas and the second process gas may cease at the same time or may cease at separate times.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baldasseroni, Chloe Portland, US 32 1158
Chiu, Yi Chung Taipei, TW 5 16
Kang, Hu Tualatin, US 59 7022
Kumar, Purushottam Hillsboro, US 62 2307
Lai, Wei-Chih Yilan County, TW 43 112
LaVoie, Adrien Newberg, US 181 14476
Leeser, Karl F West Linn, US 69 7610
Pasquale, Frank L Tualatin, US 24 1596
Qian, Jun Sherwood, US 149 5743
Smith, David Charles Lake Oswego, US 31 1132
Swaminathan, Shankar Beaverton, US 105 9977

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