PASSIVE DEVICE AND MANUFACTURING METHOD THEREOF
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United States of America Patent
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Issued Date -
Jun 23, 2016
app pub date -
Dec 7, 2015
filing date -
Dec 7, 2015
priority date (Note) -
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Abstract
The present invention relates to a passive device and manufacturing method thereof. A capacitor according to the present invention includes: a capacitor thin film pattern formed on the upper surface of a substrate; a plurality of trenches formed by etching the substrate formed with the capacitor thin film pattern which defines the unit area of the capacitor; an insulation layer, which fills the trench, formed with capacitor interconnection holes for exposing the metal layers formed in the substrate and constituting the capacitor; and a plurality of capacitor electrode interconnection wires formed by filling the capacitor interconnection holes with a conductive material, wherein the lower surface of the substrate is being polished in a way that the insulation layer formed in the trenches is exposed.
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