in III-V FETs

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United States of America Patent

PATENT NO 9437613
SERIAL NO

15057900

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Abstract

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In one aspect, a method of forming a multiple VT device structure includes the steps of: forming an alternating series of channel and barrier layers as a stack having at least one first channel layer, at least one first barrier layer, and at least one second channel layer; defining at least one first and at least one second active area in the stack; selectively removing the at least one first channel/barrier layers from the at least one second active area, such that the at least one first channel layer and the at least one second channel layer are the top-most layers in the stack in the at least one first and the at least one second active areas, respectively, wherein the at least one first barrier layer is configured to confine charge carriers to the at least one first channel layer in the first active area.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINES CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Josephine B Mahopac, US 263 5090
Lauer, Isaac Yorktown Heights, US 218 1833
Majumdar, Amlan White Plains, US 159 3285
Sleight, Jeffrey W Ridgefield, US 297 5088

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