Acoustic resonator having integrated lateral feature and temperature compensation feature
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United States of America Patent
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Jul 30, 2019
Grant Date -
Jun 23, 2016
app pub date -
Feb 29, 2016
filing date -
Oct 25, 2012
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Abstract
A bulk acoustic wave (BAW) resonator device includes a bottom electrode on a substrate over one of a cavity and an acoustic mirror, a piezoelectric layer on the bottom electrode, a top electrode on the piezoelectric layer, and a temperature compensation feature having positive temperature coefficient for offsetting at least a portion of a negative temperature coefficient of the piezoelectric layer. At least one of the bottom electrode and the top electrode includes an integrated lateral feature configured to create at least one of a cut-off frequency mismatch and an acoustic impedance mismatch.
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