RAPID TEM SAMPLE PREPARATION METHOD WITH BACKSIDE FIB MILLING
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United States of America Patent
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Oct 29, 2015
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Oct 29, 2014
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Abstract
A method for TEM sample preparation with backside milling of a sample extracted from a workpiece in an energetic-beam instrument such as a FIB-SEM is disclosed. The method includes rotating a nanomanipulator probe tip holding an extracted sample by an angle calculated according to the geometry of the apparatus; moving the instrument stage to position a TEM grid in a fixed holder so that the plane of the TEM grid is substantially parallel to the required plane for the TEM sample; attaching the extracted sample to the TEM grid; and, tilting the stage by a stage-tilt angle, while maintaining the holder in the fixed orientation with respect to the stage, so that the axis of the ion beam is made substantially parallel to the required plane for the TEM sample; thereby placing the extracted sample into position for allowing backside milling to prepare a thinned cross-sectional sample for TEM viewing.
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