High voltage chuck for a probe station

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United States of America Patent

PATENT NO 9741599
SERIAL NO

15072170

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Abstract

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A chuck for testing an integrated circuit includes an upper conductive layer having a lower surface and an upper surface suitable to support a device under test. An upper insulating layer has an upper surface at least in partial face-to-face contact with the lower surface of the upper conductive layer, and a lower surface. A middle conductive layer has an upper surface at least in partial face-to-face contact with the lower surface of the upper insulating layer, and a lower surface.

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Patent Owner(s)

  • CASCADE MICROTECH, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Garrison, Ryan Beaverton, US 6 19
Negishi, Kazuki Beaverton, US 18 54
Simmons, Michael E Colton, US 12 54
Wolf, Philip Aloha, US 11 30

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