MEMS MICRO-MIRROR DEVICE
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United States of America Patent
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Mar 14, 2016
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Jul 1, 2010
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Abstract
A MEMS micro-mirror device includes, a single package; a first mirror and second mirror, wherein at least one of the mirrors is configured to oscillate along an oscillation axis; wherein both mirrors are located within the single package and are arranged such that as the at least one mirror oscillates, the light incident on the first micro-mirror can be deflected to the second mirror.
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