ELECTROSTATIC DAMPING OF MEMS DEVICES
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United States of America Patent
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Jul 7, 2016
app pub date -
May 20, 2014
filing date -
May 20, 2014
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Abstract
The present invention generally relates to a method and apparatus for damping a plate electrode or switching element in a MEMS DVC device. A resistor disposed between a waveform controller and the electrodes of the MEMS DVC causes the voltage to increase while capacitance decreases during the time that the plate electrode is moving. Due to the increase in voltage and decrease in capacitance, the electrostatic force that resists the plate electrode movement away from an electrode increases, which in turn dampens the movement of the plate electrode.
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