Evaluation method of suitable silica powder in manufacturing vitreous silica crucible for pulling of silicon single crystal

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United States of America Patent

PATENT NO 9637405
APP PUB NO 20160200617A1
SERIAL NO

14901034

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Abstract

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An evaluation method of suitable silica powder for forming a bubble-free layer of a vitreous silica crucible for pulling of a silicon single crystal, includes: a process of measuring a porosity between silica particles in the silica powder, a process of melting the silica powder, a process of measuring a bubble content rate of a vitreous silica block obtained by cooling to harden the melted silica powder, and a process of determining whether the silica powder is suitable from the porosity of the silica powder and the bubble content rate of the vitreous silica block.

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Patent Owner(s)

  • SUMCO CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hinooka, Makiko Akita, JP 2 4
Kitahara, Ken Akita, JP 28 77
Sato, Tadahiro Akita, JP 38 198
Sudo, Toshiaki Akita, JP 56 110

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