PROCESSES FOR FORMING METAL OXIDE FILMS ON SUBSTRATES USING AMINO ACIDS
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United States of America Patent
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Jul 14, 2016
app pub date -
Oct 2, 2014
filing date -
Oct 2, 2014
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Abstract
Processes for forming metal oxide films on substrates are disclosed. The processes include depositing a composition comprising a metal oxide precursor, an amino acid, and a solvent onto a substrate. The composition is dried to remove solvent, and then heated to initiate combustion to form a metal oxide film.
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