Measurement apparatus, lithography apparatus, and method of manufacturing article

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United States of America Patent

PATENT NO 10185235
APP PUB NO 20160202620A1
SERIAL NO

14973888

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Abstract

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The present invention provides a measurement apparatus that measures a position of an object, the apparatus including a detector configured to detect a mark formed on the object and generate a detection signal, and a processor configured to obtain the position of the object based on the detection signal, wherein the processor is configured to obtain the position of the object based on a portion of the detection signal that is limited based on information about a tolerance regarding a measurement precision for the object.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Egashira, Shinichi Utsunomiya, JP 20 29

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