PROBE DISPLACEMENT MEASURING APPARATUS, IONIZATION APPARATUS INCLUDING THE SAME, AND MASS SPECTROMETRY APPARATUS
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United States of America Patent
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Issued Date -
Jul 14, 2016
app pub date -
Jan 6, 2016
filing date -
Jan 6, 2016
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Abstract
A probe displacement measuring apparatus includes a cantilever probe, a light irradiation unit configured to irradiate the probe with light, a light receiving element configured to receive reflected light obtained by reflecting light emitted by the light irradiation unit on a surface of the probe as a spot, and a displacement obtaining unit configured to obtain displacement of the probe in accordance with a position of the spot on the light receiving element. The light receiving element has first and second light receiving surfaces divided by a straight division line. An angle defined by a displacement direction of the spot on the light receiving element and the division line is 0° or more and 90° or less.
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