Vibration element manufacturing method, vibration element, electronic device, electronic apparatus, and moving object

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United States of America Patent

PATENT NO 10128430
APP PUB NO 20160204334A1
SERIAL NO

14992265

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Abstract

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A method of manufacturing a gyro element as a vibration element is a manufacturing method of processing a quartz crystal substrate to form an outward shape of a gyro element including a vibrating arm and form recessed portions in a vibrating arm. The method includes forming the outward shape of a gyro element from one surface of the quartz crystal substrate using dry etching and forming the recessed portions using wet etching.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Il, Toshihiro Minamiminowa, JP 10 42
Matsuo, Atsushi Okaya, JP 117 1022
Sugiyama, Takatoshi Tatsuno, JP 37 1413
Yamada, Yohei Chino, JP 70 173

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