METHODS OF FORMING LAYERS
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United States of America Patent
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Issued Date -
Jul 21, 2016
app pub date -
Nov 18, 2015
filing date -
Apr 7, 2011
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A method of forming a layer, the method including providing a substrate having at least one surface adapted for forming a layer thereon; directing a particle beam towards the surface of the substrate, the particle beam including particles, wherein the particle beam has an angle of incidence with respect to the substrate, and is configured so that the particles have implant energies that are not greater than about 100 eV; changing the angle of incidence of the particle beam, the implant energy of the particles, or a combination thereof; and directing the particle beam towards the surface of the substrate a subsequent time, wherein the particles of the particle beam form a layer on the substrate.
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