Position detection apparatus, lens apparatus, image pickup system, machine tool apparatus, exposure apparatus, position detection method, and non-transitory computer-readable storage medium which are capable of detecting reference position with high accuracy
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United States of America Patent
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Feb 26, 2019
Grant Date -
Jul 21, 2016
app pub date -
Jan 11, 2016
filing date -
Jan 16, 2015
priority date (Note) -
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status (Latency Note)
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Abstract
A position detection apparatus detects a position of an object, and the position detection apparatus includes a detector, a scale having a periodic pattern, the scale and the detector being movable relatively to each other, and a signal processor configured to generate a reference signal indicating a reference position of the scale, and the signal processor is configured to generate the reference signal based on a ratio of a first phase signal and a second phase signal from the detector.
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