Moveable edge coupling ring for edge process control during semiconductor wafer processing

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10658222
APP PUB NO 20160211166A1
SERIAL NO

14705430

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Abstract

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A substrate processing system includes a processing chamber and a pedestal arranged in the processing chamber. An edge coupling ring is arranged adjacent to a radially outer edge of the pedestal. A first actuator is configured to selectively move the edge coupling ring to a raised position, relative to the pedestal to provide clearance between the edge coupling ring and the pedestal to allow a robot arm to remove the edge coupling ring from the processing chamber.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Casaes, Raphael Alameda, US 11 537
McChesney, Jon Fremont, US 36 1298
O'Neill, Robert Griffith Hayward, US 9 344
Paterson, Alex San Jose, US 110 2809
Yan, Haoquan Fremont, US 16 1556

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