Monitoring thin film deposition

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United States of America Patent

PATENT NO 10704150
APP PUB NO 20160215397A1
SERIAL NO

15026453

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Abstract

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A system for monitoring thin film deposition is described. The system includes a quartz crystal and a synthesizer to generate a modulated signal. The modulated signal is to be grounded through the quartz crystal. The system also includes a phase detector to determine a phase of the modulated signal from the quartz crystal in order to monitor thin film deposition. A modulation index can be selected so that, at resonance, high frequency of the signal matches the crystal frequency.

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Patent Owner(s)

Patent OwnerAddress
INFICON INCTWO TECHNOLOGY PLACE EAST SYRACUSE NY 13057

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Rinzan, Mohamed Buhary Manlius, US 7 12

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