CONDUCTIVE TARGET MATERIAL
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United States of America Patent
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Sep 3, 2014
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Sep 5, 2013
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Abstract
A conductive target material includes substantially one lithium compound, preferably lithium phosphate, and carbon, as well as typical impurities. A process for producing a conductive target material and a thin-film battery using a conductive target material for deposition of a lithium ion electrolyte layer are also provided.
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