Method of Coating a Substrate
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United States of America Patent
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Aug 4, 2016
app pub date -
Sep 2, 2014
filing date -
Sep 9, 2013
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Abstract
The invention relates to a method of coating a substrate in a deposition chamber. The method comprising the steps of providing a source of at least one liquid precursor; atomizing the at least one liquid precursor into liquid droplets in the deposition chamber for producing aerosol; filling the deposition chamber with aerosol for forming saturated aerosol in the deposition chamber; and settling saturated aerosol by gravitation towards a surface of the substrate for coating the substrate in the deposition chamber.
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